Improved test results

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Improved test results

Display of Inspection Results Diagram

Performance：Aixtron 2800 G4 IC2: 4” x12pcs

Early cycle：3rd run

Mid cycle：10th run

End of cycle：23th run

Midas Design：Improved Production Uniformity (Mother and Substrate Design)

Performance：Aixtron 2800 G4 IC2: 4” x15pcs － Change in Design：satellite disk for LED production

‧Improved Result: Increased chip brightness yield

Original Design：Newton Rings (Inconsistent Thickness)

Design #1

Design #2

‧AlAs/AlGaAs DBR: SBC uniformity improved from 0.77% (original substrate) to 0.295% (Sophic substrate)
‧Stop band center λ=4nd→Thickness uniformity improved

Midas Substrate：Φ220mm, 350um

Midas Substrate：Φ220mm, 450um

Midas Substrate：Φ221mm, 350um

Original Substrate：Φ220mm, 620um

‧InGaAs /AlGaAs MQW: PL uniformity improved from 0.23% (original substrate) to 0.176% (Midas substrate)

Midas Substrate：Φ220mm, 350um

Midas Substrate：Φ220mm, 450um

Midas Substrate：Φ221mm, 350um

Original Substrate：Φ220mm, 620um

Performance：Aixtron 2800 G4 IC2: 3” x14pcs － DFB production

Original Production Pattern

Design #1

Design #2

Performance：Aixtron 2600 G3: 4” x12pcs

Change in Design：susceptor, collector ring, satellite disk － LED production

Change in Design：susceptor, collector ring, satellite disk － VCSEL production

‧Original Design

‧Optimized Design

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